Abstract
Double cantilever beam MEMS switch was developed for wireless LAN applications. The two beams are controlled by a single actuation electrode. The dimension of the fabricated cantilever beam is 150?m × 60?m × 0.6?m. The spacing between the top beam and the bottom ground electrode was approximately 1?m. This switch has low pull-in voltage of 15V and fast switching speed of 60?s. An RF performance with >-50dB isolation below 5GHz and <-0.18dB up to 30GHz was observed.