Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems

V. Beroulle; Y. Bertrand; L. Latorre; P. Nouet

doi:10.1109/VTS.2002.1011177

Proceedings 20th IEEE VLSI Test Symposium (VTS 2002)

Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems

Year: 2002, Pages: 0439

DOI Bookmark: 10.1109/VTS.2002.1011177

Authors

V. Beroulle, Laboratoire d ?Informatique de Robotique et de Micro?lectronique de Montpellier
Y. Bertrand, Laboratoire d ?Informatique de Robotique et de Micro?lectronique de Montpellier
L. Latorre, Laboratoire d ?Informatique de Robotique et de Micro?lectronique de Montpellier
P. Nouet, Laboratoire d ?Informatique de Robotique et de Micro?lectronique de Montpellier

Abstract

In this paper, the Oscillation-based Test Methodology (OTM) is evaluated in the context of MEMS testing. Both qualitative and quantitative evaluations of fault coverage are discussed and the impact of test on productio yield is addressed. This article also introduces the Lorentz force as a low-cost stimulus for electro-mechanical structures.

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